High-resolution single-photon imaging remains a big challenge due to the complex hardware manufacturing craft and noise disturbances. Here, we introduce deep learning into SPAD, enabling super-resolution single-photon imaging with enhancement of bit depth and imaging quality. We first studied the complex photon flow model of SPAD electronics to accurately characterize multiple physical noise sources, and collected a real SPAD image dataset (64 × 32 pixels, 90 scenes, 10 different bit depths, 3 different illumination flux, 2790 images in total) to calibrate noise model parameters. With this physical noise model, we synthesized a large-scale realistic single-photon image dataset (image pairs of 5 different resolutions with maximum megapixels, 17250 scenes, 10 different bit depths, 3 different illumination flux, 2.6 million images in total) for subsequent network training. To tackle the severe super-resolution challenge of SPAD inputs with low bit depth, low resolution, and heavy noise, we further built a deep transformer network with a content-adaptive self-attention mechanism and gated fusion modules, which can dig global contextual features to remove multi-source noise and extract full-frequency details. We applied the technique in a series of experiments including microfluidic inspection, Fourier ptychography, and high-speed imaging. The experiments validate the technique's state-of-the-art super-resolution SPAD imaging performance.
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