Optical simulations allow the evaluation of the absorption, reflection, and transmission of each functional layer of solar cells and, therefore, are of great importance for the design of high-efficiency crystalline silicon (c-Si) solar cells. Here, a multi-scale simulation method (MSM) based on ray and wave optics is proposed to investigate the optical characteristics of c-Si solar cells. The ray and wave optical methods are first independently employed on inverted pyramid glass sheets, where the latter one can describe the size-dependent interfacial scattering characteristics more accurately. Then the optical properties of a c-Si solar cell with a tunnel oxide passivated carrier-selective contact configuration are studied by employing the MSM, where scattering at the interfaces is acquired by a finite-difference time-domain method (wave optics). Since the MSM can accurately simulate optical modes such as the Rayleigh anomaly, Bloch mode, and Mie resonances, the reflection and transmission spectra of the whole device are in good agreement with the measured data. The proposed MSM has proven to be accurate for structures with functional thin films, which can be extended to hybrid tandem devices with top-level cells consisting of stacks of layers with similar dimensions.