Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

Xiaorui Liang; Lei Zhang; Qiulin Tan; Wenhua Cheng; Dan Hu; Shuang Li; Lin Jing; Jijun Xiong

doi:10.1038/s41378-023-00586-0

Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

Microsyst Nanoeng. 2023 Sep 11:9:110. doi: 10.1038/s41378-023-00586-0. eCollection 2023.

Authors

Xiaorui Liang^{1

2}, Lei Zhang^{1

2}, Qiulin Tan^{1

2}, Wenhua Cheng^{1

2}, Dan Hu^{1

2}, Shuang Li^{1

2}, Lin Jing³, Jijun Xiong^{1

2}

Affiliations

¹ State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, 030051 China.
² Key Laboratory of Micro/nano Devices and Systems, Ministry of Education, North University of China, Tai Yuan, 030051 China.
³ School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore, 639798 Singapore.

Abstract

This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS₂@Go (MMG) composite to widen the humidity detection range and improve the humidity sensitivity, including a fast response time (3.18 s) and recovery time (0.94 s). The TPH sensor was shown to operate steadily between 25-700 °C, 0-700 kPa, and 10-98% RH. Coupling issues among multiple parameters in complex environments were addressed by decoupling the Δf-temperature coupling factor to improve the accuracy. Therefore, this work can be applied to simultaneous measurements of several environmental parameters in challenging conditions.

Keywords: Electrical and electronic engineering; Sensors.