Nanoscale and Wafer Scale Study of Epitaxial Ruthenium Films on Amorphous SiO2 Substrate with van der Waals Graphene Buffer Layer
Microsc Microanal
.
2023 Jul 22;29(Supplement_1):1674-1675.
doi: 10.1093/micmic/ozad067.861.
Authors
Lihua Zhang
1
,
Kim Kisslinger
1
,
Zonghuan Lu
2
3
,
Neha Dhull
2
3
,
Tung-Sheng Kuan
4
,
Morris Washington
2
3
,
Toh-Ming Lu
2
3
,
Gwo-Ching Wang
2
3
Affiliations
1
Brookhaven National Laboratory, Center for Functional Nanomaterials, Upton, NY, United States.
2
Department of Physics, Applied Physics, and Astronomy, Rensselaer Polytechnic Institute, Troy, NY, United States.
3
Center for Materials, Devices, and Integrated Systems (cMDIS), Rensselaer Polytechnic Institute, Troy, NY, United States.
4
Department of Physics, University at Albany, State University of New York, Albany, NY, United States.
PMID:
37613865
DOI:
10.1093/micmic/ozad067.861
No abstract available