Expanding the Role of Atom Probe Tomography in Semiconductor Manufacturing and R&D - The Initiation of a Project Between CAMECA Instruments Inc. and imec
Microsc Microanal
.
2023 Jul 22;29(Supplement_1):2079-2080.
doi: 10.1093/micmic/ozad067.1076.
Authors
Robert M Ulfig
1
,
David A Reinhard
1
,
David J Larson
1
,
Peter Clifton
1
,
Olivier Dulac
2
,
Claudia Fleischmann
3
4
,
Paul van der Heide
3
Affiliations
1
CAMECA Instruments Inc, Madison WI, United States.
2
CAMECA SAS Gennevilliers, Cedex, France.
3
Interuniversitair Microelectronica Centrum, Leuven, Belgium.
4
Quantum-Solid-State Physics, Department of Physics and Astronomy, KU Leuven, Belgium.
PMID:
37612973
DOI:
10.1093/micmic/ozad067.1076
No abstract available