Semiconductor cleaning system ultra-clean flow control pumps are critical equipment in the semiconductor industry. Among them, the perfluoroalkoxy alkane (PFA) spring is a pivotal component to control the pump, and its dynamic performance is crucial to ensure the efficient operation of the system. However, the dynamic performance of the spring is often affected by the operating frequency. This paper studied the effect of different working frequencies on the dynamic property of the spring through compression-cycle experiments under uniaxial sinusoidal excitation. The force-displacement curves under different compression frequencies were fitted to obtain the dynamic stiffness of the PFA spring under different cyclic loading frequencies. The variation in the spring's hysteresis coefficient was evaluated using the hysteresis curves of different cyclic loading conditions. After 2 million compression experiments, the changes in dynamic stiffness, hysteresis coefficient, and spring height were investigated. The obtained results revealed that, as the frequency increases, the dynamic stiffness of the spring increases. The hysteresis coefficient of the PFA spring is the largest at 10 Hz and the smallest at 6 Hz. Upon conducting 2 million compression tests, it was discovered that the dynamic stiffness experiences the greatest attenuation rate of 4.19% at a frequency of 8 Hz, whereas the hysteresis coefficient undergoes the largest attenuation of 42.1% at a frequency of 6 Hz. The results will help to improve the design and application level of PFA springs.
Keywords: PFA spring; ductility coefficient; dynamic properties; dynamic stiffness; frequency.