Terahertz Biaxial Strain Sensor Based on Double-Upright Cross Metamaterial

Yanfei Liu; Yu Chen; Jing Li; Chunli Zhang; Qiannan Wu; Ningning Su; Mengwei Li

doi:10.3390/mi14040816

Terahertz Biaxial Strain Sensor Based on Double-Upright Cross Metamaterial

Micromachines (Basel). 2023 Apr 4;14(4):816. doi: 10.3390/mi14040816.

Authors

Yanfei Liu^{1

2

3

4}, Yu Chen^{2

3

4

5}, Jing Li^{2

3

4

5}, Chunli Zhang^{1

2

3

4}, Qiannan Wu^{1

2

3

4}, Ningning Su^{1

2

3

4}, Mengwei Li^{2

3

4

5

6}

Affiliations

¹ School of Semiconductors and Physics, North University of China, Taiyuan 030051, China.
² Center for Microsystem Integration, North University of China, Taiyuan 030051, China.
³ School of Instrument and Intelligent Future Technology, North University of China, Taiyuan 030051, China.
⁴ Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China.
⁵ School of Instrument and Electronics, North University of China, Taiyuan 030051, China.
⁶ Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

Abstract

In this article, a terahertz metamaterial biaxial strain pressure sensor structure is proposed, which can address the problems of the low sensitivity, the narrow pressure measurement range, and the uniaxial-only detection of existing terahertz pressure sensors. The performance of the pressure sensor was studied and analyzed using the time-domain finite-element-difference method. By changing the substrate material and optimizing the structure of the top cell, the size of the structure that can simultaneously improve the range and sensitivity of the pressure measurements was determined. The simulation results show that the sensor has a pressure-sensing effect in the frequency range of 1.0-2.2 THz under the conditions of transverse electric (TE) and transverse magnetic (TM) polarization, and the sensitivity can reach up to 346 GHz/μm. The proposed metamaterial pressure sensor has significant applications in the remote monitoring of target structure deformation.

Keywords: biaxial strain; metamaterial; pressure sensor; terahertz.

Grants and funding

This research was funded by the Double First-Class Disciplines National First-Class Curriculum Construction, the National Future Technical College Construction Project, the Shanxi Province Postgraduate Education Reform Project, and the “173” Projects of China, grant numbers 11013168, 11013410, 11013169, 11012103, 11012133 and 2020JCJQZD043, and 2021JCJQJJ0172.