3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moiré Depth Sectioning Method

Huihui Wen; Hongye Zhang; Runlai Peng; Chao Liu; Shuman Liu; Fengqi Liu; Huimin Xie; Zhanwei Liu

doi:10.1002/smtd.202300107

3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moiré Depth Sectioning Method

Small Methods. 2023 Sep;7(9):e2300107. doi: 10.1002/smtd.202300107. Epub 2023 Jun 10.

Authors

Huihui Wen^{1

2}, Hongye Zhang^{2

3}, Runlai Peng³, Chao Liu⁴, Shuman Liu⁴, Fengqi Liu⁴, Huimin Xie⁵, Zhanwei Liu²

Affiliations

¹ School of Electrical Engineering, Hebei University of Science and Technology, Shijiazhuang, 050018, China.
² School of Aerospace Engineering, Beijing Institute of Technology, Beijing, 100081, China.
³ School of Technology, Beijing Forestry University, Beijing, 100083, China.
⁴ Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.
⁵ AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China.

PMID: 37300326
DOI: 10.1002/smtd.202300107

Abstract

The mechanical properties of micro- and nanoscale materials directly determine the reliability of heterostructures, microstructures, and microdevices. Therefore, an accurate evaluation of the 3D strain field at the nanoscale is important. In this study, a scanning transmission electron microscopy (STEM) moiré depth sectioning method is proposed. By optimizing the scanning parameters of electron probes at different depths of the material, the sequence STEM moiré fringes (STEM-MFs) with a large field of view, which can be hundreds of nanometers obtained. Then, the 3D STEM moiré information constructed. To some extent, multi-scale 3D strain field measurements from nanometer to the submicrometer scale actualized. The 3D strain field near the heterostructure interface and single dislocation accurately measured by the developed method.

Keywords: 3D strain field; STEM-MF; depth sectioning; large field of view.

Abstract

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