Cross-axis sensitivity is generally undesirable, and lower values are required for the accurate performance of a thermal accelerometer. In this study, errors in devices are utilized to simultaneously measure two physical quantities of an unmanned aerial vehicle (UAV) in the X-, Y-, and Z-directions, i.e., where three accelerations and three rotations can also be simultaneously measured using a single motion sensor. The 3D structures of thermal accelerometers were designed and simulated in a FEM simulator using commercially available FLUENT 18.2 software Obtained temperature responses were correlated with input physical quantities, and a graphical relationship was created between peak temperature values and input accelerations and rotations. Using this graphical representation, any values of acceleration from 1g to 4g and rotational speed from 200 to 1000°/s can be simultaneously measured in all three directions.
Keywords: cross-axis sensitivity; microelectromechanical system; motion sensor; thermal accelerators; unmanned aerial vehicle.