The sol-gel process is an effective method for the preparation of homogeneous structured nanomaterials whose physico-chemical properties strongly depend on the experimental conditions applied. The control of a three-component reaction with silanes showing multiple reaction sites revealed the need for an analytical tool that allows a rapid response to ongoing transformations in the reaction mixture. Herein, we describe the implementation of near-infrared (NIR) spectroscopy based on compact, mechanically robust, and cost-efficient micro-optomechanical system technology in the sol-gel process of three silanes with a total of nine reaction sites. The NIR-spectroscopically controlled reaction yields a long-time stable product with reproducible quality, fulfilling the demanding requirements for further use in coating processes. 1H nuclear magnetic resonance measurements are used as reference values for the calibration of a partial least squares (PLS) regression model. The precise prediction of the desired parameters from collected NIR spectroscopy data acquired during the sol-gel reaction proves the applicability of the calibrated PLS regression model. The determined shelf-life and further processing tests verify the high quality of the sol-gel and the produced highly cross-linked polysilane.