The controlled placement of colloidal semiconductor nanocrystals (NCs) onto planar surfaces is crucial for scalable fabrication of single-photon emitters on-chip, which are critical elements of optical quantum computing, communication, and encryption. The positioning of colloidal semiconductor NCs such as metal chalcogenides or perovskites is still challenging, as it requires a nonaggressive fabrication process to preserve the optical properties of the NCs. In this work, periodic arrays of 2500 nanoholes are patterned by electron beam lithography in a poly(methyl methacrylate) (PMMA) thin film on indium tin oxide/glass substrates. Colloidal core/shell CdSe/CdS NCs, functionalized with a SiO2 capping layer to increase their size and facilitate deposition into 100 nm holes, are trapped with a close to optimal Poisson distribution into the PMMA nanoholes via a capillary assembly method. The resulting arrays of NCs contain hundreds of single-photon emitters each. We believe this work paves the way to an affordable, fast, and practical method for the fabrication of nanodevices, such as single-photon-emitting light-emitting diodes based on colloidal semiconductor NCs.
© 2023 The Authors. Published by American Chemical Society.