An analysis of nonlinear thickness vibration frequencies of multi-layered film bulk acoustic resonators

Yurun Chen; Yan Guo; Rongxing Wu; Ji Wang; Huimin Jing; Ji Lin; Yahui Tian; Haifeng Zhang

doi:10.1016/j.ultras.2023.107038

An analysis of nonlinear thickness vibration frequencies of multi-layered film bulk acoustic resonators

Ultrasonics. 2023 Aug:133:107038. doi: 10.1016/j.ultras.2023.107038. Epub 2023 May 11.

Authors

Yurun Chen¹, Yan Guo², Rongxing Wu³, Ji Wang⁴, Huimin Jing¹, Ji Lin¹, Yahui Tian⁵, Haifeng Zhang⁶

Affiliations

¹ Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, 818 Fenghua Road, Ningbo 315211, Zhejiang, China.
² Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, 818 Fenghua Road, Ningbo 315211, Zhejiang, China; College of Science and Technology, Ningbo University, 521 Wenwei Road, Cixi 315300, Zhejiang, China.
³ Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, 818 Fenghua Road, Ningbo 315211, Zhejiang, China; Department of Architectural Engineering, Ningbo Polytechnic, 388 East Lushan Road, Ningbo 315800, Zhejiang, China.
⁴ Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, 818 Fenghua Road, Ningbo 315211, Zhejiang, China; Pexar Technology Corporation, Institute of Acoustics Technology, 5 Yanjiuyuan Road, Changshu Suzhou 215513, Jiangsu, China. Electronic address: wangji@nbu.edu.cn.
⁵ Institute of Acoustics, Chinese Academy of Sciences, 100190 Beijing, China.
⁶ Department of Mechanical and Energy Engineering, University of North Texas, Denton, TX 76203, USA.

PMID: 37196574
DOI: 10.1016/j.ultras.2023.107038

Abstract

The fast reduction of the physical size of film bulk acoustic wave resonators as a layered structure implies the intensification of the electric field which can induce large deformation in the functioning state of devices as a circuit element. Consequently, the nonlinear behavior of the resonator and accompanying properties are to be included and evaluated in the development and optimization for performance improvement. With this objective, the nonlinear formulation of a multilayered film bulk acoustic resonator is presented for the analysis of vibration frequencies and mode shapes with the consideration of larger mechanical deformation. The dominantly linear relationship between the voltage or deformation and frequency is obtained to understand the nonlinear behavior and properties which have been subjected to extensive research analytically and experimentally to satisfy the application needs in all modes of communications and network technology.

Keywords: BAW; FBAR; Galerkin method; Nonlinear; SMR; Structure; Vibration.