Faraday cup fast ion loss detectors have attractive properties for fusion applications, as they can measure wide ranges of energy, are intrinsically neutron-hardened, and can be packaged in very small form factors. The latter allows them to be installed as arrays, offering opportunities to decouple fast ion loss location and magnitude in fully three-dimensional magnetic fields. In this work, we characterize the layer thicknesses of detector prototypes using spectral reflectance measurements, confocal laser scanning microscopy, as well as raster electron microscopy with a focused ion beam. We find that the measured layer thicknesses agree well enough with the specification to allow for accurate measurements. The as-manufactured heights are on the high side, increasing reliability. The data presented here further sets the basis for future optimizations in manufacturing.
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