Transducer-Aware Hydroxy-Rich-Surface Indium Oxide Gas Sensor for Low-Power and High-Sensitivity NO2 Gas Sensing

Gyuweon Jung; Hunhee Shin; Se Won Jeon; Yong Hyun Lim; Seongbin Hong; Do Heui Kim; Jong-Ho Lee

doi:10.1021/acsami.3c00022

Transducer-Aware Hydroxy-Rich-Surface Indium Oxide Gas Sensor for Low-Power and High-Sensitivity NO₂ Gas Sensing

ACS Appl Mater Interfaces. 2023 May 10;15(18):22651-22661. doi: 10.1021/acsami.3c00022. Epub 2023 Apr 28.

Authors

Gyuweon Jung¹, Hunhee Shin¹, Se Won Jeon², Yong Hyun Lim², Seongbin Hong¹, Do Heui Kim², Jong-Ho Lee¹

Affiliations

¹ Department of Electrical and Computer Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea.
² School of Chemical and Biological Engineering, Institute of Chemical Processes, Seoul National University, Seoul 08826, Republic of Korea.

PMID: 37115020
DOI: 10.1021/acsami.3c00022

Abstract

Low-power metal oxide (MOX)-based gas sensors are widely applied in edge devices. To reduce power consumption, nanostructured MOX-based sensors that detect gas at low temperatures have been reported. However, the fabrication process of these sensors is difficult for mass production, and these sensors are lack uniformity and reliability. On the other hand, MOX film-based gas sensors have been commercialized but operate at high temperatures and exhibit low sensitivity. Herein, commercially advantageous highly sensitive, film-based indium oxide sensors operating at low temperatures are reported. Ar and O₂ gases are simultaneously injected during the sputtering process to form a hydroxy-rich-surface In₂O₃ film. Conventional indium oxide (In₂O₃) films (A0) and hydroxy-rich indium oxide films (A1) are compared using several analytical techniques. A1 exhibits a work function of 4.92 eV, larger than that of A0 (4.42 eV). A1 exhibits a Debye length 3.7 times longer than that of A0. A1 is advantageous for gas sensing when using field effect transistors (FETs) and resistors as transducers. Because of the hydroxy groups present on the surface of A1, A1 can react with NO₂ gas at a lower temperature (∼100 °C) than A0 (180 °C). Operando diffuse reflectance infrared Fourier transform spectrometry (DRIFTS) shows that NO₂ gas is adsorbed to A1 as nitrite (NO₂^-) at 100 °C and nitrite and nitrate (NO₃^-) at 200 °C. After NO₂ is adsorbed as nitrate, the sensitivity of the A1 sensor decreases and its low-temperature operability is compromised. On the other hand, when NO₂ is adsorbed only as nitrite, the performance of the sensor is maintained. The reliable hydroxy-rich FET-type gas sensor shows the best performance compared to that of the existing film-based NO₂ gas sensors, with a 2460% response to 500 ppb NO₂ gas at a power consumption of 1.03 mW.

Keywords: FET-type gas sensor; RF sputtering; indium oxide; metal oxide; operando diffuse reflectance Fourier transform spectrometry (DRIFTS); resistor-type gas sensor.