Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Youcao Ma; Jian Song; Yuyao Zhao; Kiyotaka Tanaka; Shijunbo Wu; Chao Dong; Xubo Wang; Isaku Kanno; Jun Ouyang; Jia Zhou; Yue Liu

doi:10.3390/ma16083185

Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Materials (Basel). 2023 Apr 18;16(8):3185. doi: 10.3390/ma16083185.

Authors

Youcao Ma¹, Jian Song², Yuyao Zhao², Kiyotaka Tanaka³, Shijunbo Wu², Chao Dong², Xubo Wang², Isaku Kanno³, Jun Ouyang⁴, Jia Zhou¹, Yue Liu²

Affiliations

¹ State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China.
² State Key Laboratory of Metal Matrix Composites, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
³ Department of Mechanical Engineering, Kobe University, Kobe 657-8501, Japan.
⁴ School of Chemistry and Chemical Engineering, Qilu University of Technology, Jinan 250353, China.

Abstract

Lead zirconate titanate (PZT) films have shown great potential in piezoelectric micro-electronic-mechanical system (piezo-MEMS) owing to their strong piezoelectric response. However, the fabrication of PZT films on wafer-level suffers with achieving excellent uniformity and properties. Here, we successfully prepared perovskite PZT films with similar epitaxial multilayered structure and crystallographic orientation on 3-inch silicon wafers, by introducing a rapid thermal annealing (RTA) process. Compared to films without RTA treatment, these films exhibit (001) crystallographic orientation at certain composition that expecting morphotropic phase boundary. Furthermore, dielectric, ferroelectric and piezoelectric properties on different positions only fluctuate within 5%. The relatively dielectric constant, loss, remnant polarization and transverse piezoelectric coefficient are 850, 0.1, 38 μC/cm² and -10 C/m², respectively. Both uniformity and properties have reached the requirement for the design and fabrication of piezo-MEMS devices. This broadens the design and fabrication criteria for piezo-MEMS, particularly for piezoelectric micromachined ultrasonic transducers.

Keywords: dielectric properties; lead zirconate titanate (PZT); micro-electronic-mechanical system (MEMS); piezoelectric properties; rapid thermal annealing.

Grants and funding

J. Zhou and Y. Liu acknowledge the financial support of the State Key Laboratory of ASIC and System, Fudan University (Nos. 2021KF002 and 2018KF007). J. Zhou acknowledges the financial support of the National Natural Science Foundation of China with Grant Nos. 62274039. J. Ouyang acknowledges the financial support from the Jinan City Science and Technology Bureau (Grant No. 2021GXRC055) and the seed funding for top talents in Qilu University of Technology (Shandong Academy of Sciences).