The discovery of piezoelectricity inspired several sensing applications. For these applications, the thinness and flexibility of the device increase the range of implementations. A thin lead zirconate titanate (PZT) ceramic piezoelectric sensor is advantageous compared with bulk PZT or a polymer when it comes to having minimal impacts on dynamics and high-frequency bandwidth provided by low mass or high stiffness, while satisfying constraints regarding tight spaces. PZT devices have traditionally been thermally sintered inside a furnace and this process consumes large amounts of time and energy. To overcome such challenges, we employed laser sintering of PZT that focused the power onto selected areas of interest. Furthermore, non-equilibrium heating offers the opportunity to use low-melting-point substrates. Additionally, carbon nanotubes (CNTs) were mixed with PZT particles and laser sintered to utilize the high mechanical and thermal properties of CNTs. Laser processing was optimized for the control parameters, raw materials and deposition height. A multi-physics model of laser sintering was created to simulate the processing environment. Sintered films were obtained and electrically poled to enhance the piezoelectric property. The piezoelectric coefficient of laser-sintered PZT increased by approximately 10-fold compared with unsintered PZT. Moreover, CNT/PZT film displayed higher strength compared with PZT film without CNTs after the laser sintering while using less sintering energy. Thus, laser sintering can be effectively used to enhance the piezoelectric and mechanical properties of CNT/PZT films, which can be used in various sensing applications.
Keywords: CNT; PZT; laser sintering; piezoelectricity; sensors.