Acoustoelectric Effect of Rayleigh and Sezawa Waves in ZnO/Fused Silica Produced by an Inhomogeneous In-Depth Electrical Conductivity Profile

Sensors (Basel). 2023 Mar 9;23(6):2988. doi: 10.3390/s23062988.

Abstract

The acousto-electric (AE) effect associated with the propagation of Rayleigh and Sezawa surface acoustic waves (SAWs) in ZnO/fused silica was theoretically investigated under the hypothesis that the electrical conductivity of the piezoelectric layer has an exponentially decaying profile akin to the photoconductivity effect induced by ultra-violet illumination in wide-band-gap photoconducting ZnO. The calculated waves' velocity and attenuation shift vs. ZnO conductivity curves have the form of a double-relaxation response, as opposed to a single-relaxation response which characterizes the AE effect due to surface conductivity changes. Two configurations were studied which reproduced the effect of UV light illumination from the top or from the bottom side of the ZnO/fused silica substrate: 1. the ZnO conductivity inhomogeneity starts from the free surface of the layer and decreases exponentially in depth; 2. the conductivity inhomogeneity starts from the lower surface of the ZnO layer contacting the fused silica substrate. To the author's knowledge, this is the first time the double-relaxation AE effect has been theoretically studied in bi-layered structures.

Keywords: Rayleigh wave; Sezawa wave; UV; ZnO; acoustoelectric effect.

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