We report a non-resonant piezoelectric microelectromechanical cantilever system for the measurement of liquid viscosity. The system consists of two PiezoMEMS cantilevers in-line, with their free ends facing each other. The system is immersed in the fluid under test for viscosity measurement. One of the cantilevers is actuated using the embedded piezoelectric thin film to oscillate at a pre-selected non-resonant frequency. The second cantilever, the passive one, starts to oscillate due to the fluid-mediated energy transfer. The relative response of the passive cantilever is used as the metric for the fluid's kinematic viscosity. The fabricated cantilevers are tested as viscosity sensors by carrying out experiments in fluids with different viscosities. The viscometer can measure viscosity at a single frequency of choice, and hence some important considerations for frequency selection are discussed. A discussion on the energy coupling between the active and the passive cantilevers is presented. The novel PiezoMEMS viscometer architecture proposed in this work will overcome several challenges faced by state-of-the-art resonance MEMS viscometers, by enabling faster and direct measurement, straightforward calibration, and the possibility of shear rate-dependent viscosity measurement.
Keywords: Electrical and electronic engineering; Nanometrology.
© The Author(s) 2023.