We demonstrate a narrow linewidth 980 nm laser by self-injection locking of an electrically pumped distributed-feedback (DFB) laser diode to a high quality (Q) factor (>105) lithium niobate (LN) microring resonator. The lithium niobate microring resonator is fabricated by photolithography-assisted chemo-mechanical etching (PLACE) technique, and the Q factor of lithium niobate microring is measured as high as 6.91 × 105. The linewidth of the multimode 980 nm laser diode, which is ~2 nm measured from its output end, is narrowed down to 35 pm with a single-mode characteristic after coupling with the high-Q LN microring resonator. The output power of the narrow-linewidth microlaser is about 4.27 mW, and the wavelength tuning range reaches 2.57 nm. This work explores a hybrid integrated narrow linewidth 980 nm laser that has potential applications in high-efficient pump laser, optical tweezers, quantum information, as well as chip-based precision spectroscopy and metrology.
Keywords: chemo-mechanical etching; lithium niobate; microring resonator; narrow linewidth; photolithography; self-injection locking.