Embedded racetrack microring resonator sensor based on GeSbSe glasses

Zhiyong Li; Cheng Hou; Ye Luo; Wei Zhang; Lan Li; Peipeng Xu; Tiefeng Xu

doi:10.1364/OE.478613

Embedded racetrack microring resonator sensor based on GeSbSe glasses

Opt Express. 2023 Jan 16;31(2):1103-1111. doi: 10.1364/OE.478613.

Authors

Zhiyong Li, Cheng Hou, Ye Luo, Wei Zhang, Lan Li, Peipeng Xu, Tiefeng Xu

PMID: 36785152
DOI: 10.1364/OE.478613

Abstract

In this article, a compact racetrack double microring resonator (MRR) sensor based on Ge₂₈Sb₁₂Se₆₀ (GeSbSe) is investigated. The sensor device consists of a racetrack microring, an embedded small microring, and a strip waveguide. Electron beam lithography (EBL) and dry etching are used to fabricate the device. The compact racetrack double MRR device are obtained with Q-factor equal to 7.17 × 10⁴ and FSR of 24 nm by measuring the transmission spectrum. By measuring different concentrations of glucose solutions, a sensitivity of 297 nm/RIU by linear fitting and an intrinsic limit of detection (iLOD) of 7.40 × 10^-5 are obtained. It paves the way for the application of chalcogenide glasses in the field of biosensing.