Control of the morphology and hierarchy of the nanopore structures of anodic alumina is investigated by employing stepwise anodizing processes, alternating the two different anodizing modes, including mild anodization (MA) and hard anodization (HA), which are further mediated by a pore-widening (PW) step in between. For the experiment, the MA and HA are applied at the anodizing voltages of 40 and 100 V, respectively, in 0.3 M oxalic acid, at 1 °C, for fixed durations (30 min for MA and 0.5 min for HA), while the intermediate PW is applied in 0.1 M phosphoric acid at 30 °C for different durations. In particular, to examine the effects of the anodizing sequence and the PW time on the morphology and hierarchy of the nanopore structures formed, the stepwise anodization is conducted in two different ways: one with no PW step, such as MA→HA and HA→MA, and the other with the timed PW in between, such as MA→PW→MA, MA→PW→HA, HA→PW→HA, and HA→PW→MA. The results show that both the sequence of the voltage-modulated anodizing modes and the application of the intermediate PW step led to unique three-dimensional morphology and hierarchy of the nanopore structures of the anodic alumina beyond the conventional two-dimensional cylindrical pore geometry. It suggests that the stepwise anodizing process regulated by the sequence of the anodizing modes and the intermediate PW step can allow the design and fabrication of various types of nanopore structures, which can broaden the applications of the nanoporous anodic alumina with greater efficacy and versatility.
Keywords: alumina; anodization; hierarchical nanostructures; hybrid nanostructures; nanopore.