Fabrication and Characterization of In0.53Ga0.47As/InAs/In0.53Ga0.47As Composite Channel Metamorphic HEMTs (mHEMTs) on a GaAs Substrate

Abstract

In this work, we successfully demonstrated In_0.53Ga_0.47As/InAs/In_0.53Ga_0.47As composite channel metamorphic high electron mobility transistors (mHEMTs) on a GaAs substrate. The fabricated mHEMTs with a 100 nm gate length exhibited excellent DC and logic characteristics such as V_T = -0.13 V, g_m,max = 949 mS/mm, subthreshold swing (SS) = 84 mV/dec, drain-induced barrier lowering (DIBL) = 89 mV/V, and I_on/I_off ratio = 9.8 × 10³ at a drain-source voltage (V_DS) = 0.5 V. In addition, the device exhibited excellent high-frequency characteristics, such as f_T/f_max = 261/304 GHz for the measured result and well-matched modeled f_T/f_max = 258/309 GHz at V_DS = 0.5 V, which is less power consumption compared to other material systems. These high-frequency characteristics are a well-balanced demonstration of f_T and f_max in the mHEMT structure on a GaAs substrate.

Keywords: GaAs; HEMT; In0.53Ga0.47As/InAs/In0.53Ga0.47As composite channel; InAs HEMT; InGaAs HEMT; InGaAs/InAs/InGaAs composite channel; Mo-based Ohmic contact; mHEMT.