This paper proposes to improve the output performance of a piezoelectric pump by matching the resonant frequency of the resonator to the optimal operating mode of bridge-type polydimethylsiloxane (PDMS) check valves. Simulation analyses reveal that the side-curling mode of the PDMS valve is conducive to liquid flow and exhibits a faster frequency response compared with the first bending mode. The first bending resonant frequency of a beam-type piezoelectric resonator was tuned close to the side-curling mode of the PDMS valve by adjusting the weight of two mass blocks installed on both ends of the resonator, so that both the resonator and the valve could work at their best conditions. Experiments were conducted on a detachable prototype piezoelectric pump using PDMS valves with three different lengths. The results confirm that the peak flowrate at the resonant point of the pump reaches its maximum when the resonant frequencies between the resonator and the valve are matched. Maximum peak flowrates of 88 mL/min, 72 mL/min and 70 mL/min were achieved at 722 Hz, 761 Hz and 789 Hz, respectively, for diaphragm pumps using five-, four- and three-inlet-hole PDMS valves, under a driving voltage of 300 Vpp.
Keywords: PDMS check valve; piezoelectric pump; resonant frequency matching; side-curling mode.