Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation

Junwu Wang; Xinbing Wang; Duluo Zuo

doi:10.1007/s12200-020-0964-8

Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation

Front Optoelectron. 2021 Sep;14(3):352-359. doi: 10.1007/s12200-020-0964-8. Epub 2020 Apr 14.

Authors

Junwu Wang¹, Xinbing Wang², Duluo Zuo²

Affiliations

¹ Wuhan National Research Center for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China. wjw1546112421@163.com.
² Wuhan National Research Center for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China.

Abstract

In this paper, a CO₂ laser induced discharge plasma extreme ultraviolet (EUV) source experimental device was established. The optical emission spectroscopy was used to diagnose the characteristics of the plasma, and the evolution of electron temperature and electron density with time was obtained. The influence of discharge voltage on plasma parameters was analyzed and discussed. The EUV radiation characteristics of the plasma were investigated by self-made grazing incidence EUV spectrometer. The EUV radiation intensity and conversion efficiency were discussed.

Keywords: electron temperature and density; extreme ultraviolet (EUV) radiation; laser induced discharge plasma; optical emission spectroscopy.