Fabrication of gold-doped crystalline-silicon nanomembrane-based wearable temperature sensor

Kyowon Kang; Mingyu Sang; Baoxing Xu; Ki Jun Yu

doi:10.1016/j.xpro.2022.101925

Fabrication of gold-doped crystalline-silicon nanomembrane-based wearable temperature sensor

STAR Protoc. 2023 Mar 17;4(1):101925. doi: 10.1016/j.xpro.2022.101925. Epub 2022 Dec 16.

Authors

Kyowon Kang¹, Mingyu Sang¹, Baoxing Xu², Ki Jun Yu³

Affiliations

¹ School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seodaemungu, Seoul 03722, Republic of Korea.
² Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, VA 22904, USA.
³ School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seodaemungu, Seoul 03722, Republic of Korea; School of Electrical and Electronic Engineering, YU-KIST Institute, Yonsei University, 50 Yonsei-ro, Seodaemungu, Seoul 03722, Republic of Korea. Electronic address: kijunyu@yonsei.ac.kr.

Abstract

Wearable temperature sensors with high thermal sensitivity are required for precise and continuous body temperature monitoring. Here, we present a protocol for fabricating a thin, stretchable, and ultrahigh thermal-sensitive wearable sensor based on gold-doped crystalline-silicon nanomembrane (SiNM). We provide detailed steps of gold doping technique to SiNM and fabrication processes for gold-doped crystalline-SiNM based wearable temperature sensor. For complete details on the use and execution of this protocol, please refer to Sang et al. (2022).¹.

Keywords: Biotechnology and bioengineering; Material sciences.

Publication types

Research Support, Non-U.S. Gov't

MeSH terms

Gold
Silicon
Temperature
Wearable Electronic Devices*

Substances

Silicon
Gold