Miniaturised gap sensor using fibre optic Fabry-Pérot interferometry for structural health monitoring

Opt Express. 2022 Nov 21;30(24):42923-42932. doi: 10.1364/OE.462070.

Abstract

A miniaturised structural health monitoring device has been developed capable of measuring the absolute distance between close parallel surfaces using Fabry-Pérot interferometry with nm-scale sensitivity. This is achieved by fabricating turning mirrors on two opposite cores of a multi-core fibre to produce a probe with dimensions limited only be the fibre diameter. Two fabrication processes have been investigated: Focused ion beam milling, which has resulted in a sensor measurement accuracy, sensitivity and range of ±0.056 µm, ±0.006 µm and ∼16000 µm respectively; and ultrafast laser assisted etching of the cleaved fibre end, where a sensor measurement accuracy, sensitivity and range of ±0.065 µm, ±0.006 µm and ∼7500 µm have been demonstrated.

MeSH terms

  • Fiber Optic Technology*
  • Interferometry*
  • Lasers