This paper shows the possibility to detect the presence of grafted molecules on the surface of silicon nanowires with a wireless RF radar approach based on the measurement of the backscattered signal of a resonant structure on which the nanowires are deposited. The measured resonance frequency allows the determination of the intrinsic properties related to temperature and humidity variations, which can be related to the presence of the grafted molecules. Several functionalizations of nanowires have been realized and characterized. For the first time, an RF approach is used to detect significant differences related to the presence of grafted molecules on the surface of nanowires. In addition to detecting their presence, the obtained results show the potential of the radar approach to identify the type of functionalization of nanowires. A set of six different grafted molecules (including octadecyltrichlorosilane, ethynylpyrene, N3) was tested and correctly separated with the proposed approach. Various measurements of the same samples showed a good repeatability which made the approach compatible with the possibility of differentiating the molecules with each other by radar reading. Moreover, discussions about the application of such functionalizations are made to increase the sensibility of sensors using a radar approach.
Keywords: RF characterization; humidity dependency; physicochemical characterization; radar; silicon nanowires; surface functionalization; temperature dependency; wireless measurement.