1 Micro‑ and Nanoelectronic Systems, Institute of Micro and Nanotechnologies MacroNano, Technische Universität Ilmenau, Ilmenau, Germany.
2 Micro‑ and Nanoelectronic Systems, Institute of Micro and Nanotechnologies MacroNano, Technische Universität Ilmenau, Ilmenau, Germany. benjamin.spetzler@tu-ilmenau.de.