A novel flexible thermocouple film sensor on a polyimide substrate is proposed that is simple and flexible for monitoring the respiratory signal. Several thermocouples were connected in series and patterned on the polyimide substrate, and each one is formed by copper and a constant line connected to each other at two nodes. The respiratory signal was measured by the output voltage, which resulted from the temperature difference between the hot and cold junctions. The sensors were fabricated with surface-microfabrication technology with three sputtering steps. The measurement results showed that the peak voltage decreased by 90% in the case of apnea compared with normal breathing. The sensor has potential application for wearable detection of sleep apnea hypopnea syndrome (OSAHS).
Keywords: flow sensor; heat transfer; respiratory monitoring; thermocouple.