The development of microelectronic products increases the demand for on-chip miniaturized electrochemical energy storage devices as integrated power sources. Such electrochemical energy storage devices need to be micro-scaled, integrable and designable in certain aspects, such as size, shape, mechanical properties and environmental adaptability. Lithium-ion batteries with relatively high energy and power densities, are considered to be favorable on-chip energy sources for microelectronic devices. This review describes the state-of-the-art of miniaturized lithium-ion batteries for on-chip electrochemical energy storage, with a focus on cell micro/nano-structures, fabrication techniques and corresponding material selections. The relationship between battery architecture and form-factors of the cell concerning their mechanical and electrochemical properties is discussed. A series of on-chip functional microsystems created by integrating micro-lithium-ion batteries are highlighted. Finally, the challenges and future perspectives of miniaturized lithium-ion batteries are elaborated with respect to their potential application fields.
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