A micro-drive system is a key part of macro-micro-drive technology and precision positioning technology in which a micro-drive reduction system can provide more precise motion and suitable small space motion. Therefore, it is necessary to study precision micro-drive reduction systems. In this paper, based on the design of a micro-drive reduction mechanism without force and displacement in non-motion direction, a precision micro-drive reduction system driven by a piezoelectric ceramic actuator (PZT) was designed, and the strength, dynamic and motion performance of the system was analyzed. First, based on the principle of a flexure hinge lever and the principle of balanced additional force, a type of precision micro-drive reduction mechanism with an adjustable reduction ratio was designed. Second, the strength performance of the system was analyzed by finite element analysis, and the dynamic performance of the system was analyzed by finite element analysis and experiments. Finally, the kinematic performance of the system was analyzed by theoretical analysis, the finite element method and experiment, and the motion linear equation was calculated based on the linear fitting equations of three methods. The study results showed that the system had good strength and dynamic performances, and the system's motion had the advantages of high precision and good linearity. This research has certain reference value for the design and performance research of micro-drive mechanisms.
Keywords: PZT; flexible hinge; kinematic performance; micro-drive system.