Full-spectrum cathodoluminescence (CL) mapping provides a point-by-point spatial measurement of the apparent band gap of a semiconductor thin film. In most studies, analysis of the electrical film properties from CL is presented as color mapping images. We have developed a spectra data analysis algorithm to functionalize, analyze, and generate statistical measurements of the luminescence data to provide additional insights. This algorithm was coded in the R language program, and a set of CdMgSeTe films were studied as an application case study. CL maps were measured for samples with different luminescent responses. A quantitative measure of the heterogeneity of the films was generated by statistical analysis of luminescent intensity and wavelength, spectra type curves, frequency distributions of peak wavelength, and relative intensity maps. The final CL analysis facilitates the investigation of the CdMgSeTe films and has potential applications for many semiconductor films.
© 2022 The Authors. Published by American Chemical Society.