A Nanoscale Sensor Based on a Toroidal Cavity with a Built-In Elliptical Ring Structure for Temperature Sensing Application

Feng Liu; Shubin Yan; Lifang Shen; Pengwei Liu; Lili Chen; Xiaoyu Zhang; Guang Liu; Jilai Liu; Tingsong Li; Yifeng Ren

doi:10.3390/nano12193396

A Nanoscale Sensor Based on a Toroidal Cavity with a Built-In Elliptical Ring Structure for Temperature Sensing Application

Nanomaterials (Basel). 2022 Sep 28;12(19):3396. doi: 10.3390/nano12193396.

Authors

Feng Liu^{1

2

3}, Shubin Yan^{2

3}, Lifang Shen², Pengwei Liu^{1

2

3}, Lili Chen², Xiaoyu Zhang^{1

2

3}, Guang Liu², Jilai Liu², Tingsong Li^{1

2

3}, Yifeng Ren¹

Affiliations

¹ School of Electrical and Control Engineering, North University of China, Taiyuan 030051, China.
² School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou 310018, China.
³ Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring of Zhejiang Province and Belarus, Hangzhou 310018, China.

Abstract

In this article, a refractive index sensor based on Fano resonance, which is generated by the coupling of a metal-insulator-metal (MIM) waveguide structure and a toroidal cavity with a built-in elliptical ring (TCER) structure, is presented. The finite element method (FEM) was employed to analyze the propagation characteristics of the integral structure. The effects of refractive index and different geometric parameters of the structure on the sensing characteristics were evaluated. The maximum sensitivity was 2220 nm/RIU with a figure of merit (FOM) of 58.7, which is the best performance level that the designed structure could achieve. Moreover, due to its high sensitivity and simple structure, the refractive index sensor can be applied in the field of temperature detection, and its sensitivity is calculated to be 1.187 nm/℃.

Keywords: Fano resonance; MIM; refractive index sensor; temperature sensing.

Abstract

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