Uniformity evaluation of laser-induced periodic surface structures formed by two-color double-pulse femtosecond laser irradiation

Keisuke Takenaka; Masaki Hashida; Hitoshi Sakagami; Shin-Ichiro Masuno; Mitsuhiro Kusaba; Shigeru Yamaguchi; Satoru Iwamori; Yuji Sato; Masahiro Tsukamoto

doi:10.1063/5.0096218

Uniformity evaluation of laser-induced periodic surface structures formed by two-color double-pulse femtosecond laser irradiation

Rev Sci Instrum. 2022 Sep 1;93(9):093001. doi: 10.1063/5.0096218.

Authors

Keisuke Takenaka¹, Masaki Hashida², Hitoshi Sakagami³, Shin-Ichiro Masuno⁴, Mitsuhiro Kusaba⁵, Shigeru Yamaguchi⁶, Satoru Iwamori², Yuji Sato⁷, Masahiro Tsukamoto⁷

Affiliations

¹ Graduate School of Engineering, Osaka University, 1-1 Yamadaoka, Suita, Osaka 565-0871, Japan.
² Research Institute of Science and Technology, Tokai University, 4-1-1 Kitakaname, Hiratsuka, Kanagawa 259-1292, Japan.
³ National Institute for Fusion Science, Toki, Gifu 509-5292, Japan.
⁴ Institute for Chemical Research, Kyoto University, Gokasyo, Uji, Kyoto 611-0011, Japan.
⁵ Department of Electronics, Information and Communication Engineering, Osaka Sangyo University, 3-1-1 Nakagaito, Daito, Osaka 574-8530, Japan.
⁶ Department Physics, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292, Japan.
⁷ Joining and Welding Research Institute, Osaka University, 11-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan.

PMID: 36182495
DOI: 10.1063/5.0096218

Abstract

The Perpendicular Period and Phase Scanning (P³S) method can evaluate the uniformity of a laser-induced periodic surface structure (LIPSS). P³S assesses the uniformity of LIPSS using the standard deviation of the peak period and the average of the phase difference in the direction perpendicular to LIPSS. The P³S method demonstrates that LIPSS formed by two-color double-pulse irradiation is reduced to a quarter of the period dispersion, and the average phase difference of LIPSS is also reduced compared to the single-pulse irradiation. In addition, a 3D electromagnetic particle-in-cell simulation was performed to evaluate the possibility of an improved uniformity of LIPSS. The results confirm that the two-color double-pulse irradiation produces a uniform LIPSS and validates the effectiveness of the P³S method to assess the uniformity of LIPSS.