Fabrication and Characterization of a Highly Sensitive and Flexible Tactile Sensor Based on Indium Zinc Oxide (IZO) with Imprecise Data Analysis

Usama Afzal; Muhammad Aslam; Kanza Maryam; Ali Hussein Al-Marshadi; Fatima Afzal

doi:10.1021/acsomega.2c04156

Fabrication and Characterization of a Highly Sensitive and Flexible Tactile Sensor Based on Indium Zinc Oxide (IZO) with Imprecise Data Analysis

ACS Omega. 2022 Aug 30;7(36):32569-32576. doi: 10.1021/acsomega.2c04156. eCollection 2022 Sep 13.

Authors

Usama Afzal¹, Muhammad Aslam², Kanza Maryam³, Ali Hussein Al-Marshadi², Fatima Afzal³

Affiliations

¹ School of Microelectronics, Tianjin University, Tianjin 300072, China.
² Departments of Statistics, Faculty of Science, King Abdulaziz University, Jeddah 21551, Saudi Arabia.
³ School of Chemistry, University of the Punjab, Lahore 54590, Pakistan.

Abstract

Tactile sensors are widely used in the electronic industry. In the following research work, we proposed a tactile sensor based on indium zinc oxide (IZO) electrodes and used neutrosophic statistics to analyze the capacitance and resistance of the tactile sensor. The tactile sensor was fabricated by depositing the IZO electrodes on a polycarbonate substrate (a thin layer). The IZO was characterized through X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and ultraviolet-visible (UV-vis) spectroscopy techniques. The sensor's electrical properties were characterized using an LCR meter, i.e., capacitance and resistance were measured in intervals with respect to changes in the applied force on the sensor at 1 kHz operational frequency. The sensor expressed high sensitivity with quick response and recovery times. The sensor also expressed long-term stability. For the analysis of capacitance and resistance, two statistical approaches, i.e., classical and neutrosophic approaches, were applied, and the better analysis approach for the sensor was found.