A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes

Tian Liang; Bowen Liu; Mingwei Chen; Yulan Lu; Jian Chen; Deyong Chen; Junbo Wang

doi:10.1038/s41378-022-00418-7

A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes

Microsyst Nanoeng. 2022 Sep 15:8:100. doi: 10.1038/s41378-022-00418-7. eCollection 2022.

Authors

Tian Liang^{1

2}, Bowen Liu^{1

2}, Mingwei Chen^{1

2}, Yulan Lu^{1

2}, Jian Chen^{1

2}, Deyong Chen^{1

2}, Junbo Wang^{1

2}

Affiliations

¹ State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, 100190 China.
² School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049 China.

Abstract

This paper presents a micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes. Theoretical analyses and numerical simulations were conducted to model the angular accelerometer with key geometrical parameters (e.g., electrode spacing, via spacing and via size) optimized. Highly integrated sensitive microelectrodes were manufactured based on microfabrication and assembled to form MEMS-based electrochemical angular accelerometers. Device characterization was conducted, locating a sensitivity of 80 V/(rad/s²), a bandwidth of 0.01-18 Hz and a noise level of 3.98 × 10^-8 (rad/s²)/√Hz. In comparison to a previously reported electrochemical angular microaccelerometer, a significant improvement in sensitivity (80 V/(rad/s²) vs. 10 V/(rad/s²)) was achieved due to the new structure of sensitive microelectrodes. These results indicated the potential of the developed MEMS-based electrochemical angular accelerometer in seismology, including natural disaster monitoring and resource exploration.

Keywords: Electrical and electronic engineering; Sensors.