Developments of Interfacial Measurement Using Cavity Scanning Microwave Microscopy

Zhenrong Zhang; Huanfei Wen; Liangjie Li; Tao Pei; Hao Guo; Zhonghao Li; Jun Tang; Jun Liu

doi:10.1155/2022/1306000

Developments of Interfacial Measurement Using Cavity Scanning Microwave Microscopy

Scanning. 2022 Aug 12:2022:1306000. doi: 10.1155/2022/1306000. eCollection 2022.

Authors

Zhenrong Zhang^{1

2

3}, Huanfei Wen^{1

2

3}, Liangjie Li^{1

2

3}, Tao Pei^{1

2

3}, Hao Guo^{1

2

3}, Zhonghao Li^{1

2

3}, Jun Tang^{1

2

3}, Jun Liu^{1

2

3}

Affiliations

¹ Key Laboratory of Instrument Science and Dynamic Testing Ministry of Education, North University of China, Taiyuan 030051, China.
² Key Lab of Quantum Sensing and Precision Measurement, Shanxi Province, Taiyuan 030051, China.
³ Institute of Instrument and Electronics, North University of China, Taiyuan 030051, China.

Abstract

In the field of materials research, scanning microwave microscopy imaging has already become a vital research tool due to its high sensitivity and nondestructive testing of samples. In this article, we review the main theoretical and fundamental components of microwave imaging, in addition to the wide range of applications of microwave imaging. Rather than the indirect determination of material properties by measuring dielectric constants and conductivity, microwave microscopy now permits the direct investigation of semiconductor devices, electromagnetic fields, and ferroelectric domains. This paper reviews recent advances in scanning microwave microscopy in the areas of resolution and operating frequency and presents a discussion of possible future industrial and academic applications.

Publication types

Review