A low-g triggered micro-electromechanical system (MEMS) resonant acceleration switch is designed, fabricated and tested in this paper for near-zero power wake-up applications. The switch is actuated by ambient low-g vibration, consuming zero power while waiting for vibration at its resonant frequency. A cantilever beam and proof mass structure is adopted in the switch. The patterns of spiral cantilever beams are designed for low resonant frequency and threshold. Once the vibration with resonant frequency exceeds the acceleration threshold of the switch, the movable electrode becomes sufficiently displaced to contact the fixed electrodes and causes them to trigger. The dynamic responses of the switch are tested on a piezoelectric stack. The experimental results show that the switch closes under vibration at a frequency as low as 39.3 Hz and at an acceleration threshold of 0.074 g. A wake-up sensor node connected to the switch can awaken when the switch is under vibration as an intended characteristics.
Keywords: MEMS; acceleration switch; low-g; near-zero power; wake up.