Study on Detection of a Small Magnetic Particle Using Thin Film Magneto-Impedance Sensor with Subjecting to Strong Normal Field

Micromachines (Basel). 2022 Jul 28;13(8):1199. doi: 10.3390/mi13081199.

Abstract

This paper deals with the detection of small magnetization using a thin film magneto-impedance sensor with subjecting to strong normal field. The sensor was made by soft magnetic amorphous thin-film with uniaxial magnetic anisotropy in the width direction of the element. It was reported that the sensor has very high sensitivity, such as pico-tesla order, when it is driven by hundreds of MHz. In this paper, a sensitive measurement method aiming for detection of a small particle or a cluster of nano-particles, having low-remanence, is proposed. The point is the application of strong normal field in the measurement area including sensor element and particle. The normal strong field is applied in the normal direction of the sensor plane in the value almost hundreds of mT. Instead of such strong normal field, the sensor keeps high sensitivity, because of the demagnetizing force in the thickness direction. A theoretical estimation for clarifying an efficiency of the method, experimental results of sensor property and sensitivity with subjecting to the normal field, and also a confirmation of detection of a small particle using the proposed method is reported. As a special mention, detection fundamentals when a applied surface normal field has a distribution and also a particle would run through in the vicinity of sensor is discussed.

Keywords: detection of contamination; high-frequency; magnetic field sensor; magneto-impedance; normal field; small particle; thin film.

Grants and funding

This work was supported by Nationwide Cooperative Research Projects by the Research Institute of Electrical Communication, Tohoku University. It was also funded by the budget of Miyagi prefecture for a research and development of industrial technology.