Influence of the Electron Beam and the Choice of Heating Membrane on the Evolution of Si Nanowires' Morphology in In Situ TEM

Ya Shen; Xuechun Zhao; Ruiling Gong; Eric Ngo; Jean-Luc Maurice; Pere Roca I Cabarrocas; Wanghua Chen

doi:10.3390/ma15155244

Influence of the Electron Beam and the Choice of Heating Membrane on the Evolution of Si Nanowires' Morphology in In Situ TEM

Materials (Basel). 2022 Jul 29;15(15):5244. doi: 10.3390/ma15155244.

Authors

Ya Shen¹, Xuechun Zhao¹, Ruiling Gong¹, Eric Ngo², Jean-Luc Maurice², Pere Roca I Cabarrocas², Wanghua Chen¹

Affiliations

¹ School of Physical Science and Technology, Ningbo University, Ningbo 315211, China.
² Laboratoire de Physique des Interfaces et des Couches Minces (LPICM), Centre National de la Recherche Scientifique (CNRS), Ecole Polytechnique, Institut Polytechnique de Paris, 91128 Palaiseau, France.

Abstract

We used in situ transmission electron microscopy (TEM) to observe the dynamic changes of Si nanowires under electron beam irradiation. We found evidence of structural evolutions under TEM observation due to a combination of electron beam and thermal effects. Two types of heating holders were used: a carbon membrane, and a silicon nitride membrane. Different evolution of Si nanowires on these membranes was observed. Regarding the heating of Si nanowires on a C membrane at 800 °C and above, a serious degradation dependent on the diameter of the Si nanowire was observed under the electron beam, with the formation of Si carbide. When the membrane was changed to Si nitride, a reversible sectioning and welding of the Si nanowire was observed.

Keywords: TEM; electron beam irradiation; growth; silicon nanowire.

Grants and funding

This research was partly funded by the French national research agency ANR in the framework of “Equipements d’excellence” Project No. 10-EQPX-0050 “TEMPOS–NanoMAX”. Wanghua Chen is grateful for the support from the Natural Science Foundation of Ningbo, China (Grant No. 2021J068).