We report an optofluidic hybrid silicon-polymer planar ring resonator with integrated microfluidic channels for efficient liquid delivery. The device features a planar architecture of intersecting liquid-core waveguides and microfluidic channels. A low-loss integration of microfluidic channels is accomplished by exploiting the interference pattern created by the self-imaging effect in the multimode interference-based coupler waveguides. Numerical simulations have been performed in order to minimize the propagation losses along the ring loop caused by the integration of microfluidic channels. The device has been fabricated and optically characterized by measuring the quality factor, obtaining a value of 4 × 103. This result is comparable with the quality factor of an optofluidic ring with the same optical layout but without integrated microfluidic channels, thus, confirming the suitability of the proposed approach for microfluidics integration in planar optofluidic design.
Keywords: antiresonant reflecting optical waveguide (ARROW); integrated optics; microfluidics; optical resonators; optofluidics.