Metamaterial-assisted illumination nanoscopy (MAIN) has been proven to be a promising approach for super-resolution microscopy with up to a 7-fold improvement in imaging resolution. Further resolution enhancement is possible in principle, however, has not yet been demonstrated due to the lack of high-quality ultrathin layered hyperbolic metamaterials (HMMs) used in the MAIN. Here, we fabricate a low-loss composite HMM consisting of high-quality bilayers of Al-doped Ag and MgO with a nominal thickness of 2.5 nm, and then use it to demonstrate an ultrathin layered hyperbolic metamaterial-assisted illumination nanoscopy (ULH-MAIN) with a 14-fold imaging resolution improvement. This improvement of resolution is achieved in fluorescent beads super-resolution experiments and verified with scanning electron microscopy. The ULH-MAIN presents a simple super-resolution imaging approach that offers distinct benefits such as low illumination power, low cost, and a broad spectrum of selectable probes, making it ideal for dynamic imaging of life science samples.
Keywords: Hyperbolic metamaterials; Metamaterial assisted illumination; Metamaterials; Nanoscopy; Structured illumination microscopy; Super-resolution microscopy.