The machining of micro/nano periodic surface structures using a femtosecond laser has been an academic frontier and hotspot in recent years. With an ultrahigh laser fluence and an ultrashort pulse duration, femtosecond laser machining shows unique advantages in material processing. It can process almost any material and can greatly improve the processing accuracy with a minimum machining size and heat-affected zone. Meanwhile, it can fabricate a variety of micro/nano periodic surface structures and then change a material's surface performance dramatically, such as the material's wetting performance, corrosive properties, friction properties, and optical properties, demonstrating great application potential in defense, medical, high-end manufacturing, and many other fields. In recent years, the research is gradually deepening from the basic theory to optimization design, intelligent control, and application technology. Nowadays, while focusing on metal structure materials, especially on stainless steel, research institutions in the field of micro and nano manufacturing have conducted systematic and in-depth experimental research using different experimental environments and laser-processing parameters. They have prepared various surface structures with different morphologies and periods with sound performance, and are one step closer to many civilian engineering applications. This paper reviews the study of micro/nano periodic surface structures and the performance of stainless steel machined using a femtosecond laser, obtains the general evolution law of surface structure and performance with the femtosecond laser parameters, points out several key technical challenges for future study, and provides a useful reference for the engineering research and application of femtosecond laser micro/nano processing technology.
Keywords: femtosecond laser; micro/nano periodic surface structure; research progress; stainless steel; surface performance.