A hybrid method for lattice image reconstruction and deformation analysis

Hongye Zhang; Runlai Peng; Huihui Wen; Huimin Xie; Zhanwei Liu

doi:10.1088/1361-6528/ac780f

A hybrid method for lattice image reconstruction and deformation analysis

Nanotechnology. 2022 Jul 1;33(38). doi: 10.1088/1361-6528/ac780f.

Authors

Hongye Zhang^{1

2}, Runlai Peng¹, Huihui Wen^{2

3}, Huimin Xie⁴, Zhanwei Liu²

Affiliations

¹ School of Technology, Beijing Forestry University, Beijing 100083, People's Republic of China.
² School of Aerospace Engineering, Beijing Institute of Technology, Beijing 100081, People's Republic of China.
³ School of Electrical Engineering, Hebei University of Science and Technology, Shijiazhuang 050018, People's Republic of China.
⁴ AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, People's Republic of China.

PMID: 35696988
DOI: 10.1088/1361-6528/ac780f

Abstract

Geometric phase analysis (GPA) is a powerful tool to investigate the deformation in nanoscale measurement, especially in dealing with high-resolution transmission electron microscopy images. The traditional GPA method using the fast Fourier transform is built on the relationship between the displacement and the phase difference. In this paper, a nano-grid method based on real-space lattice image processing was firstly proposed to enable the measurement of nanoscale interface flatness, and the thickness of different components. Then, a hybrid method for lattice image reconstruction and deformation analysis was developed. The hybrid method enables simultaneous real-space and frequency-domain processing, thus, compensating for the shortcomings of the GPA method when measuring samples with large deformations or containing cracks while retaining its measurement accuracy.

Keywords: HRTEM; deformation measurement; geometric phase analysis; lattice image reconstruction.