Electrostatic probe diagnosis is the main method of plasma diagnosis. However, the traditional diagnosis theory is affected by many factors, and it is difficult to obtain accurate diagnosis results. In this study, a long short-term memory (LSTM) approach is used for plasma probe diagnosis to derive electron density (Ne) and temperature (Te) more accurately and quickly. The LSTM network uses the data collected by Langmuir probes as input to eliminate the influence of the discharge device on the diagnosis that can be applied to a variety of discharge environments and even space ionospheric diagnosis. In the high-vacuum gas discharge environment, the Langmuir probe is used to obtain current-voltage (I-V) characteristic curves under different Ne and Te. A part of the data input network is selected for training, the other part of the data is used as the test set to test the network, and the parameters are adjusted to make the network obtain better prediction results. Two indexes, namely, mean squared error (MSE) and mean absolute percentage error (MAPE), are evaluated to calculate the prediction accuracy. The results show that using LSTM to diagnose plasma can reduce the impact of probe surface contamination on the traditional diagnosis methods and can accurately diagnose the underdense plasma. In addition, compared with Te, the Ne diagnosis result output by LSTM is more accurate.
Keywords: LSTM; Langmuir probe; machine learning; plasma diagnosis.