Zinc oxide nanoparticles were obtained by plasma-enhanced chemical vapor deposition (PECVD) under optical emission spectrometry control from elemental high-purity zinc in a zinc-oxygen-hydrogen plasma-forming gas mixture with varying deposition parameters: a zinc source temperature, and a reactor temperature in a deposition zone. The size and morphological parameters of the zinc oxide nanopowders, structural properties, and homogeneity were studied. The study was carried out with use of methods such as scanning electron microscopy, X-ray structural analysis, and Raman spectroscopy, as well as statistical methods for processing and analyzing experimental data. It was established that to obtain zinc oxide nanoparticles with a given size and morphological characteristics using PECVD, it is necessary (1) to increase the zinc source temperature to synthesize more elongated structures in one direction (and vice versa), and (2) to decrease the reactor temperature in the deposition zone to reduce the transverse size of the deposited structures (and vice versa), taking into account that at relatively low temperatures instead of powder structures, films can form.
Keywords: PECVD; morphology; nanoparticles; structure; zinc oxide.