Research on the High Sensitivity Detection Method of Carbon Nanotube/Polydimethylsiloxane Composites Structure

Lishuang Liu; Ruirong Wang; Hao Guo; Jinping Liu; Xin Li; Yue Qin; Jun Tang

doi:10.3390/mi13050719

Research on the High Sensitivity Detection Method of Carbon Nanotube/Polydimethylsiloxane Composites Structure

Micromachines (Basel). 2022 Apr 30;13(5):719. doi: 10.3390/mi13050719.

Authors

Lishuang Liu¹, Ruirong Wang^{1

2}, Hao Guo¹, Jinping Liu¹, Xin Li¹, Yue Qin¹, Jun Tang¹

Affiliations

¹ Key Laboratory of Instrumentation Science and Dynamic Measurement, School of Instrument and Electronics, North University of China, Taiyuan 030051, China.
² Department of Electronic Engineering, Taiyuan Institute of Technology, Taiyuan 030008, China.

Abstract

In this paper, a carbon nanotube (CNT)/polydimethylsiloxane (PDMS) composite force-sensitive structure with good flexibility is proposed and fabricated, and the measurement of scanning electron microscopy (SEM) and Raman are carried out. The equivalent circuit of force-sensitive test of structure is performed and analyzed under direct current (DC) and alternating current (AC) conditions. Under AC conditions, experimental results further show that the sensitivity and sensitivity factors of force-sensitive structures are 0.15 KPa^-1 and 2.17 in the pressure range of 600-1000 KPa compressive stress and 20-50% tensile stress, respectively. These results are increased by 36.4% and 38.2% compared to the results of compressive stress (0.11 KPa^-1) and tensile stress (1.57) under DC conditions, respectively. It shows that the carbon nanotube/PDMS composite has higher test accuracy under AC conditions.

Keywords: carbon nanotube/polydimethylsiloxane (CNT/PDMS); force-sensitive test; high sensitivity.

Grants and funding

This work is supported by the National Natural Science Foundation of China, Grant No. 51775522, Scientific and Technological Innovation Programs of Higher Education Institutions in Shanxi, Grant No. 2020L0638, Shanxi province key laboratory of quantum sensing and precision measurement, Grant No. 201905D121001, Shanxi ‘1331 Project’ Key Subjects Construction, Applied Basic Research Program in Shanxi Province, Grant No. 201901D211203, 201801D221230.