Multilayer films of exfoliated 2D oxide nanosheets by electrospray deposition

Moritz Nunnenkamp; Karin J H van den Nieuwenhuijzen; Johan E Ten Elshof

doi:10.1038/s41598-022-12768-3

Multilayer films of exfoliated 2D oxide nanosheets by electrospray deposition

Sci Rep. 2022 May 23;12(1):8673. doi: 10.1038/s41598-022-12768-3.

Authors

Moritz Nunnenkamp¹, Karin J H van den Nieuwenhuijzen¹, Johan E Ten Elshof²

Affiliations

¹ MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands.
² MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands. j.e.tenelshof@utwente.nl.

Abstract

The potential of the electrospray deposition technique as new method to make nanosheet-based multilayer films is evaluated. Densely packed nanosheet-based films with thicknesses of 1-20 nm with rms roughnesses of 2.1-2.4 nm were fabricated on samples of 1 cm² size with a growth rate of 0.5 nm/min. Electrosprayed Ti_0.87O₂ nanosheet films were successfully used as oriented growth templates for 40 nm perovskite SrRuO₃ thin films grown by pulsed laser deposition. The electrospray method provides a fast and easy alternative to the more commonly used Langmuir-Blodgett (LB) deposition method for nanosheet films.