A high-speed and high-temperature calorimetric solid-state thermal mass flow sensor (TMFS) design was proposed and its sensitivity to temperature and airflow speed were numerically assessed. The sensor operates at 573.15 Kelvin (300 °C), measuring speeds up to 265 m/s, and is customized to be a transducer for an aircraft Air Data System (ADS). The aim was to enhance the system reliability against ice accretion on pitot tubes' pressure intakes, which causes the system to be inoperative and the aircraft to lose protections that ensure its safe operation. In this paper, the authors assess how the distance between heater and thermal sensors affects the overall TMFS sensitivity and how it can benefit from the inclusion of a thermal barrier between these elements. The results show that, by increasing the distance between the heater and temperature sensors from 0.1 to 0.6 mm, the sensitivity to temperature variation is improved by up to 80%, and that to airspeed variation is improved by up to 100%. In addition, adding a thermal barrier made of Parylene-N improves it even further, by nearly 6 times, for both temperature and air speed variations.
Keywords: Air Data System; MEMS; TMFS; calorimetric; flow sensor; sensitivity.