Tip-Enhanced Raman Spectroscopy (TERS) is a topographic and chemical analysis technique with nanoscale resolution, consisting of the combination of Scanning Probe Microscopy (SPM) and Localized Surface Plasmon Resonance (LSPR) for the enhancement of Raman scattering in the vicinity of the probe. The quantification of spatial resolution represents an important issue, and, as of now, standards for calibration are not available. In the present work a candidate reference sample for TERS measurements was fabricated. It consists of a flat, conductive gold surface with a nanometric grating of a self-assembled monolayer of Raman-active organic molecules fabricated by an optimized Electron Beam Lithography (EBL) method to replicate established SPM calibration standards. Its feasibility as a TERS standard was tested by STM-TERS imaging.
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